Laboratory for CVD/CVI Technologies

Laboratory for CVD/CVI Technologies

The main laboratory activities:

- Mode testing and choice of methods for composites (LSI, RMI, CVI, CVD, etc.) design, depending on their functional purpose. Development of technological processes for manufacturing products;

- Research of new methods for chemical synthesis of refractory compounds from liquid and gas phase;

- Technology development of HfC, TаC, ZrC, SiC chemical vapor deposition (CVD) from the gas phase of halogen containing compounds.

- Development of optimal deposition patterns and supply/exhaust lines configuration for CVI processes.

The laboratory has mastered high-purity pBN (CVD) and pSiC (CVD, CVI) production.